Jim continued to say: "If the next node doesn't cost less than the last node, we got a problem because I don't think the demand will be there." Well, it is now clear that EUV is not ready and that dimensional scaling below 28nm will require double and triple lithography with its associated additional costs.
http://www.eetimes.com/author.asp?section_id=36&doc_id=1322783
And there, my friends, is why POET is the answer: faster, more efficient and cheaper to build.