think this is why it was challenging.

Definition and repeatability of 100-nm has been difficult in the POET labs due to the limitations of available lithography tools and other equipment.

this will help that.

Dr. Geoff Taylor, Chief Scientist and Board member noted: “Developing the 100-nm feature size technology in the current POET labs has proven to be challenging. With the collaboration of our “3rdparty foundry”, we now have access to state of the art equipment highlighted by a state of the art ebeam writing tool. This will help us make the process more stable and predictable and help prove our process in a true manufacturing environment.”