This is the tool Epiworks is using:
http://www.aixtron.com/fileadmin/documents/Technologien/Produktblatt_AIX_2800G4-TM_low.pdf
EpiWorks Launches Major Expansion of MOCVD Production Capacity
CHAMPAIGN-URBANA, ILLINOIS – March 19th, 2014 – Today, EpiWorks, a leading developer and manufacturer of compound semiconductor epitaxy, announced a major multi-faceted expansion of its production capacity.
“A clear migration toward applications that require significantly higher volumes, particularly in the area of optical materials and photonics is underway. The markets include consumer electronics, sensors and displays, digital projection, and data communications. As the leader in the manufacture and development of high performance compound semiconductor products, we are pleased to announce a major increase in capacity. This is part of an aggressive, long-term production capacity roadmap to satisfy increasing demand from photonic and RF customers,” said Nick Kolarich, Director of Sales and Marketing at EpiWorks.
The expansion increases the ability to produce high volumes of 4-inch and 6-inch wafers for VCSELs, edge-emitting lasers, detectors and photovoltaics with an industry leading cost structure. The new capacity includes upgrades to existing tools and the latest Aixtron 2800 G4 MOCVD technology. This allows EpiWorks to quickly and seamlessly satisfy customer demand while providing greater flexibility for new product development.
“For many years EpiWorks has been the leading US-based manufacturing and development partner for novel and advanced photonic and optical devices. Our customers have leveraged our development expertise to commercialize numerous complex advanced technologies from the lab into next generation photonic products. We are excited to now see our high-volume manufacturing expertise enabling proliferation of these products under stringent specifications and at low cost,” explained Quesnell Hartmann, EpiWorks CEO.