First Order For Laytec EpiTT/VCSEL

28th June 2016

Tool will be shipped at the beginning of 2017

VCSELs grown on GaAs are currently emerging as a leading technology in rapidly expanding markets like gesture recognition, 3D imaging, datacomm and others.

Following the request of customers and using the modular concept of its Gen3 in-situ platform, Laytec has customised and expanded the related in-situ metrology performance for VCSEL epitaxy.

In May, a leading European user placed the first order for such a system called EpiTT/VCSEL. The tool will be shipped at the beginning of 2017, according to the company.

EpiTT/VCSEL contains two fibre optical heads: one for a standard EpiTT (measures wafer temperature and growth rate) and one for spectral reflectance sensing (R- VCSEL). Both can be mounted via an adapter flange on an EpiCurve head making an EpiCurve TT/VCSEL system.

This allows integrating the full EpiCurveTT performance with the spectral monitoring of DBR (distributed Bragg reflector) stop- bands and cavity dip position. EpiTT/VCSEL and EpiCurveTT/VCSEL are powered by new software modules that enable both single-pocket and multi-pocket operation.