Four new SCL tenders for equipment to be used to process and/ or test various characteristics of III-V material wafers (eg.) GaAs wafers. (Atomic Layer Deposition (ALD) Tool, Photoluminescence (PL) mapping system for Group III-V, High Resolution X-ray Diffractometer (HRXRD) system for Group III-V, Hall Effect measurement system for Group III-V).
Just sayin’.....they’re gearing up to work with III-IV compounds - whether it’s with us or not remains to be seen.
- Supply, Installation and Commissioning of Atomic Layer Deposition (ALD) Tool for 150mm and 200mm wafer size.
- Vendor’s scope of work shall cover supply, installation & commissioning of stand-alone, in-line (i.e. compatible to clean-room environment) and non-contact (i.e. non-destructive) Photoluminescence (PL) mapping system for Group III-V compound semiconductor based epi- layers operating at room temperature with necessary hardware and software. Mapping of peak position (wavelength/energy), peak intensity, integrated intensity and full-width- half-maxima of photoluminescence spectra at room temperature of below mentioned epi-layers deposited on 200mm, 150mm (support 100mm, 75mm, 50mm) wafer using Metal Organic Chemical Vapor Deposition (MOCVD) reactor. Group III-V epi-layers - InGaAs, GaAs, InAs, AlGaAs InGaP, InP, GaAsP with/without p- or n- doping on GaAs/Si/SiC substrate. Group III-Nitrides epi-layers - GaN, AlGaN, with/without p- or n-doping on GaAs/Si/SiC substrate
- Vendor’s scope of work shall cover supply, installation & commissioning of High Resolution X-ray Diffractometer (HRXRD) system with all necessary hardware and software for Group III-V compound semiconductor based epi-layers. Tool shall be capable of measuring structure information (composition, thickness, superlattice period) and the defects in structures (mismatch, relaxation, misorientation, dislocation density, curvature) of Group III-V based epi-layers (InGaAs, GaAs, InAs, AlGaAs) on GaAs/Si/SiC wafer and Group III-Nitrides epi-layers on GaAs/Si/SiC wafer of size up to 150mm diameter.
- Vendor’s scope of work shall cover supply, installation & commissioning of Hall Effect measurement system with all necessary hardware and software for Group III-V compound semiconductor based epilayers. (Eg.) GaAs Measuring the sample resistance, resistivity, carrier concentration, Hall coefficient, mobility of charge carriers, n-/p- type selection and current-voltage characteristics of metal organic chemical vapor deposition (MOCVD) reactor grown: a. Group III-V epi-layers (InGaAs, GaAs, InAs, InGaP, InP, AlGaAs, GaAsP with/without p- or n- doping) on GaAs/Si/SiC substrates of size up to 80mm. b. Group III-nitrides epilayers (GaN, AlGaN, AlN with/without p- or n- doping) on GaAs/Si/SiC substrates.